Abstract：To eliminate the impact of relative drift between DUT (device under test) and test instruments on thermoreflectance thermography, the image registration algorithm is studied, cooperated with a piezoelectric three axis nano-scale position stage, real time correction of drift is realized. Sub-pixel image registration algorithm is realized by Fourier transform, convolution in frequency domain and sinc function approximation, it can calculate the relative drift in real time; a test setup for thermoreflectance thermography is build, the position of the DUT is adjusted in real time by the three axis nano-scale position stage; the results show that, when the temperature of DUT rises from 20℃ to 50℃, there is an obvious displacement in the horizontal direction of the DUT, and this displacement can be correction by the test setup. A typical GaN HEMTs device is tested, the results are consistent with those measured by foreign testing institutions, and the image registration method is proved to be effective.
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2022, Vol. 43 
