Abstract：In order to align two probes of dual-probe atomic force microscope (AFM), it is necessary to establish a measuring head to do in-depth research on the probe A scanning the probe B. Firstly, the mechanical characteristics of the probe are obtained by finite element (FE) simulations. Secondly, using the locked-in amplifier to attain the amplitude and frequency signals to analyze the system resolution (better than 1nm), the probe is rotated 90 degrees compared traditional AFM. Lastly, probe B is scanned by probe A in YOZ plane, reducing the scanning range and scanning step gradually. The alignment accuracy is of 5 nm.
［1］Mancevski V, McClure P F. Development of a dual-probe CaliperTM CD-AFM for near model-independent nanometrology［C］//SPIE. Metrology, Inspection, and Process Control for Microlithography XVI, Santa Clara, US, 2002, 83-91.
［2］Zhang H K, Gao S T, Lu M Z, et al. Dual AFM probes alignment based on vision guidance［C］//ICMI. Sixth International Symposium on Precision Mechanical Measurements, Guiyang, China, 2013, 891627.
［3］张华坤,高思田,卢明臻,等.双探针原子力显微镜视觉对准系统［J］.光学精密工程,2014, 22(9):2399-2406.
［4］Akiyama T, Staufer U, Rooij N F, et al. Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy［J］. Review of Scientific Instruments, 2003, 74(1): 112-117.
［5］Wang L L, Lu M Z, Guo T, et al. Simulation and signal analysis of Akiyama probe applied to Atomic force microscope［C］//ICMI. Sixth International Symposium on Precision Mechanical Measurements, Guiyang, China, 2013, 89160W.
2016, Vol. 37 
