Testing Device for Large Caliber Precision Optical Element
MI Zeng-zhen1,XIE Zhi-jiang1,YUAN Xiao-dong2,LIU Chang-chun2,XU Xu2,CHU Hong-yu1
1．The state key laboratory of mechanical transmission, Chongqing University, Chongqing 400044, China
2.Research Center of Laser Fusion, CAEP, Mianyang, Sichuan 610054,China
Abstract：Aiming at the low detection efficiency of precision optical element,large caliber precision optical element was hard to be tested,a testing device for large caliber precision optical element which applied to large laser facility was designed.Through the contrast experiment on irradiate 40 mm×40 mm K9 sample plates with strong light flashlight, LED light,high brightness halogen lamp in dark field,the best detection efficiency can be got with the halogen lamp in which light intensity is the largest.3D electronic transaction platform based on linear CCD scanning was studied,this can ensure the high precision image to be grabbed.On this basis,the key technologies of image regional location,binary processing,defect detection were analyzed,element detection in high precision and real time were realized.
［1］Rainer F,Dickson R K,Jennings R T,et al.Development of Practical Damage-Mapping and Inspection Systems［C］//The Third Annual International Conference on SSLA to ICF,Monterey,USA:1999,556-563.
［2］杨甬英,陆春华,梁蛟,等.光学元件表面缺陷的显微散射暗场成像及数字化评价系统［J］.光学学报,2007,27(6):1031-1038.
［3］Burnham A K,Hackel L A,Wegner P J,et al.Improving 351-nm Damage Performance of Large-aperture Fused Silica and DKDP Optics［R］.UCRL-JC-144298,2002．
［4］戴名奎,徐德衍.光学元件的疵病检验与研究现状［J］.光学仪器,1996,18(3):33～39.
2012, Vol. 33 
