Abstract：A long gauge block interferometer for 125~1000 mm used multi-wavelengths interferometry is developed.Three stable lasers, 633nm, 543nm and 612nm, are introduced into interferometer by using a single mode fiber and used as measuring lights.The gauge block length is measured by the method of exact fractions, and five step phase stepping method is used for the calculation of fractions of interference fringes.In the chamber, the refractive index of air is calculated by modified Edlen formula to correct wavelengths.The uncertainty for gauge block measurement is U=0.02 μm+ 0.1×10- 6L(k=3)。
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2014, Vol. 35 
