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计量学报  2014, Vol. 35 Issue (z1): 72-75    DOI: 10.3969/j.issn.1000-1158.2014.z1.016
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基于激光三角法的厚度在线测量系统
傅云霞,曾燕华,石红,雷李华,祝逸庆
上海市计量测试技术研究院, 上海 201203
The System for Thickness On-line Measurement Based on Laser Triangulation
FU Yun-xia,ZENG Yan-hua,SHI Hong,LEI Li-hua,ZHU Yi-qing
Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
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摘要 基于激光三角法原理,应用激光器和新型光电位置检测元件组成的激光三角测量传感器,研制了在线实时厚度测量系统。可对生产线上的板材等厚度实现非接触在线实时测量。因无需施加测量力,所以在测量“软”质材料及保持测量稳定性方面有明显的优越性。整个系统由激光光源、光学系统、光电位置检测元件组成的激光三角测量头、测量头精密调节机构、计算机控制及数据采集处理系统组成。测量分辨率可达0.001 mm,静态测量不确定度达到0.005 mm,动态测量不确定度达到0.02 mm。
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傅云霞
曾燕华
石红
雷李华
祝逸庆
关键词 计量学激光三角法在线测量厚度线性补偿     
Abstract:Based on the principle of laser triangulation, the on-line thickness measurement system is developed with laser triangulation sensor, which is composed of laser and optoelectronic position detecting element. The system can be used in plate thickness measurement by the way of non-contact, on-line and real-time. Without force progresses, it has obvious advantages in soft materials measurement stability. The whole system is composed of laser triangulation head which composed of laser light source, optical system and photoelectric position detection components, precision adjustment, computer control system and data acquisition processing system. The results show that the resolution is 0.001 mm, static measurement uncertainty is 0.005 mm and dynamic measurement uncertainty is 0.02 mm.
Key wordsMetrology    Laser triangulation    On-line measurement    Thickness    Linear compensation
    
作者简介: 傅云霞(1964-),女,河南驻马店人,上海市计量测试技术研究院教授及高级工程师,硕士,主要从事几何量测量研究。fuyx@simt.com.cn
引用本文:   
傅云霞,曾燕华,石红,雷李华,祝逸庆. 基于激光三角法的厚度在线测量系统[J]. 计量学报, 2014, 35(z1): 72-75.
FU Yun-xia,ZENG Yan-hua,SHI Hong,LEI Li-hua,ZHU Yi-qing. The System for Thickness On-line Measurement Based on Laser Triangulation. Acta Metrologica Sinica, 2014, 35(z1): 72-75.
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