一种用于毫米波器件本征在片S参数校准的新方法

doi:10.3969/j.issn.1000-1158.2022.03.01

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摘要提出一种用于毫米波器件本征在片S参数校准的新方法。对于毫米波频段电路而言,准确已知的仿真模型是必需的,因此,精确地去嵌入测试技术就显得尤为重要。在传统开路短路去嵌入算法的基础上,建立了新型去嵌入模型和求解算法。通过增加开路短路标准的传输线长度近似得到理想开路和短路,降低测试误差;同时在模型中增加了毫米波频段逐渐变大的微波探针之间的串扰误差项。考虑到串扰求取的复杂性,该算法中不需要知道串扰准确量值就能将其有效消除。研制了相应的校准件和被测件。110GHz无源器件测试表明,该算法准确度与NIST二次串扰修正算法相当,相比于传统测试结果的S;21最大改善了1.3dB。有源器件测试结果也表明,该算法在晶体管的最大稳定增益测试方面具有更高的准确度。

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	王一帮
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	栾鹏
	刘晨
	杜静

关键词 ：计量学, 毫米波器件, 本征S参数, 去嵌入测试, 串扰, 开路短路, 校准

Abstract：To proposes accurate method for millimeter-wave devices intrinsicscatter-parameters. For millimeter-wave circuit design, accurate simulation result is required. For this reason, an accurate measurement of de-embedding is a key technique for device characterization, and is also important. In this work, a new model based on conventional open-short de-embedding method and corresponding solutionalgorithm are proposed. By adding transmission line with open and short standards to gain approximate ideal open and short, and at the same time, consummate the model with crosstalk which grows larger with increasing frequency.Considering the complex solution with crosstalk, the new model could eliminate the crosstalk influence on device under test avoiding knowing it. Calibration kits and device under test were also fabricated and measured. 110GHz Passive device was measured subject to both new method here and second tier crosstalk calibrations proposed by NIST. Measurement results demonstrate that new method is capable of eliminating the cross-talk and PAD more accurately with an improvement S;21 magnitude of 1.3dB, and show a promising result with NIST. A serial of active pHEMT test results also showed that, the new method was more accurate at device maxgain.

Key words： metrology millimeter-wave devices intrinsic S-parameter measurement of de-embedding crosstalk open-short method calibration

收稿日期: 2021-07-22 发布日期: 2022-03-23

PACS:

TB973

基金资助:河北省省级科技计划(206Z0201G)

作者简介: 王一帮(1987-),男,山东济宁人,中国电子科技集团公司第十三研究所高级工程师,主要从事无线电、电磁极值量参数计量测试的研究。Email: wangyibang@cetc13.cn

引用本文:

王一帮,吴爱华,霍晔,梁法国,栾鹏,刘晨,杜静. 一种用于毫米波器件本征在片S参数校准的新方法[J]. 计量学报, 2022, 43(3): 293-298.
WANG Yi-bang,WU Ai-hua,HUO Ye,LIANG Fa-guo,LUAN Peng,LIU Chen,DU Jing. Development of A New Method for Millimeter-waveintrinsic On-wafer Measurements. Acta Metrologica Sinica, 2022, 43(3): 293-298.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2022.03.01 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2022/V43/I3/293

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