Abstract：On the GaAs substrate the SOLT calibration kits for on-wafer S-parameter test are designed. Using simulation method, the delay and loss of the offset transmission line on every standard in the calibration kits are characterized, and using measurement method based on NIST multiline TRL calibration, the capacitance of open standard parts and the inductance of the short standard are extracted. Subsequently the impedance of load standard is known by DC resistance measurement. Finally, the tests using independent developed SOLT calibration kits and NIST multiline TRL calibration are preformed. The results show that at the frequency below 20 GHz, the maximum deviation of the transmission magnitude is 0.1 dB, and the maximum deviation of transmission phase is 3.5 degree.
［1］Williams D F, Marks R B, Davidson A. Comparison Of On-Wafer Calibrations［C］//ARFTG Conference Digest-Winter, 38th IEEE, 1991: 68-81 .
［2］Safwat A M E, Hayden L. Sensitivity Analysis of Calibration Standards for SOLT and LRRM［C］//ARFTG Conference Digest-Fall, 58th IEEE, 2001: 1-10 .
［3］Marks R B. Formulations of the Basic Vector Network Analyzer Error Model including Switch-Terms［C］//ARFTG Conference Digest-Fall, 50th IEEE, 1997: 115-126 .
［4］朱学波, 郭敏, 梁胜利. 微波功率器件测试中的探针SOLT校准技术［J］. 电子测量与仪器学报, 2008, 22(z2): 85-89 .
［5］胡江, 孙玲玲. 一种用于在片器件直接测量的新型SOLT校准方法［J］. 微波学报, 2006, 22(Z1): 135-137 .
［6］Dunsmore J P. 微波器件测量手册［M］. 陈新, 程宁,译. 北京:电子工业出版社, 2014, 103-114 .
［7］Marks R B. A multiline method of network analyzer calibration［J］. IEEE Transactions on Microwave Theory & Techniques, 1991, 39(7):1205-1215 .
［8］Deal W R, Farkas D S. A simple CAD-based method to develop and evaluate calibration standards［J］. IEEE Microwave Magazine, 2006, 7(3):70-84 .
［9］Marks R B, Williams D F. Characteristic impedance determination using propagation constant measurement［J］. IEEE Microwave & Guided Wave Letters, 1991, 1(6):141-143 .
［10］刘晨, 孙静, 吴爱华,等. 单片电路晶体管模型参数提取专用TRL校准件［J］. 计算机与数字工程, 2015, 43(1):21-23.
［11］殷玉喆, 仲博涵, 阚劲松,等. 40GHz陶瓷衬底SOLT校准片研制与定标技术研究［J］. 微波学报, 2014, 30(3):80-83.
2017, Vol. 38 
