Abstract：In order to improve the resolution of ultrasonic displacement measurement, a kind of method of displacement measurement on ultrasonic phase difference based on the ultrasonic A/D sampling is proposed. The method can eliminate the impact of DC component on displacement measurement by the subtraction of adjacent ultrasonic sampling data. Then, a mathematical model of displacement measurement on phase difference is set up, which is established by ratio of the difference between adjacent sampling data and on which the higher resolution of displacement measurement is obtained. Using above method, the sampling circuit is simple and the lower ultrasonic signal sampling rate is needed, and with only a dozen of data in a period of ultrasonic signal, the submicron level of resolution of displacement measurement can be obtained. The result of experimental data shows that this method is effective, and if the ultrasonic frequency 40 kHz is selected on the platform of ultrasonic displacement measurement by the method, the resolution of displacement measurement with 1 μm will be reached.
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2016, Vol. 37 
