Analysis and Compensation of the Nonlinear Error Based on Contact Surface Profil Measurement
SUN Yan-ling1,2,CHANG Su-ping3
1. Hubei University of Arts and Science, Xiangyang, Hubei 441053, China;
2. The Co-Innovation Center of Hubei Province of Auto Parts Manufacture Rquipment Digitizing, Xiangyang, Hubei 440153, China;
3. Huazhong University of Science and Technology, Wuhan, Hubei 430074, China
Abstract:A circular path is produced by measuring stylus rotating with the lever axle, and the horizontal deviation affects the accuracy of surface profile measurements. Based on the improvement of traditional measuring rod, the mathematical model of non-linear measurement error and the compensation algorithm of polynomial fitting error are derived. The method of calculating error compensation parameters by fitting a standard ball is proposed. For a spherical cap of 79.505 3 mm radius, experimental results shown that the size of the radius error is less than 1 μm, the effect of the compensation is better.
孙艳玲,常素萍. 接触式表面轮廓测量仪的非线性误差分析与补偿[J]. 计量学报, 2016, 37(6): 563-566.
SUN Yan-ling,CHANG Su-ping. Analysis and Compensation of the Nonlinear Error Based on Contact Surface Profil Measurement. Acta Metrologica Sinica, 2016, 37(6): 563-566.
[1]Lee C K. Diferential laser interferometer for nanometer displacement measurement [J]. AIAA Journal, 1995, 33(9):1675-1680.
[2]Bowen D K, et al. Sub-nanometer Transducer characterization by X-ray interferometry[J].Precision Engineering, 1990, 12(3):165-173.
[3]Bobroff N. Recent advances in displacement measuring interferometry[J]. Meas Sci Technol, 1995, 4(9): 907-26.
[4]Brand U, Hermann K. A laser measurement system for the high-precision calibration of displacement transducers[J]. Meas Sci Technol, 1996, 7(6): 911-917.
[5]Rank Taylor Hobson Ltd. The Form Talysurf Series 2 Operator’s Handbook (Leicester: Rank Taylor Hobson) Publication no K505/9[Z], 1996.
[6]Chang-Ock Lee, Kilsu Park, Byong Chon Park, et al. An algorithm for stylus instruments to measure aspheric surfaces[J]. Meas Sci Technol, 2005,3(16):1215-1222.