1. School of Mechanical Engineering and Automation, Zhejiang Sci-tech University, Hangzhou, Zhejiang 310018, China;
2. School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China;
3. National Institute of Metrology, Beijing 100029, China
Abstract：The shear piezoceramics stack micro-displacement measurement system is built. The second-order, third-order, forth-order least square fitting formulas of voltage with displacement are obtained by the micro-displacement measurement experiments of 5 different target voltage. The result of nonlinear correction used by the third-order least square fitting formula is the best one, the maximal nonlinear error is 3nm when the shear piezoceramics stack moving 1 050nm. The nonlinear correction for different target displacement is realized by spline fitting of the polynomial coefficient to get the relational polynomial expression. The maximal nonlinear error is 4 nm when the shear piezoceramics stack moving 900 nm, which is only 11% of the initial nonlinear error.
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2016, Vol. 37 
