微构件拉伸测试辅助引导对中测量系统设计

doi:10.3969/j.issn.1000-1158.2017.06.03

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摘要设计了一套微构件拉伸测试辅助引导对中测量系统,该系统以激光准直特性为基础并结合折反射定律,采用正交二维相机获得包含平移和角偏移的激光光点图像信息,建立了二维位移和二维角偏移与激光器成像点变化的数学模型。搭建了实验平台,依据该模型,利用MATLAB对获取图像进行处理获得需要调整的二维平移和角偏移参数变量。实验结果表明,该测量系统的二维角偏移分辨率可达到0.001°,重复性优于0.02°;二维位移分辨率可达到亚微米,重复性优于10μm。可为微构件拉伸测试中辅助引导对中提供调整参数并提高拉伸测试数据的准确性。

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	杨恩臻
	王标
	宁晓旭
	王永红

关键词 ：计量学, 引导对中, 角偏移, 微位移, 激光准直, 微构件

Abstract：An auxiliary alignment measuring system for micro component tensile test is designed. Based on laser collimation features with light refraction law and reflection law combined, the image information of laser spot including displacement and angle deviator can be obtained by orthogonal two dimensional camera. The mathematical model of the two-dimensional displacement and angle deviator and the laser image point changes is established as well as the experimental platform. On the basis of this model, the adjustable parameter variables of two-dimensional displacement and angle deviator can be acquired after processing the obtained images by MATLAB. The results of the test indicate that the two-dimensional angle deviator resolution can reach 0.001° and the repetitiveness is superior to 0.02°; the two-dimensional displacement resolution can reach submicron and the repetitiveness is superior to 10 μm. This measuring system is proved to be able to provide parameter adjustment for auxiliary guiding alignment and improve the accuracy of the tensile testing data in micro component tensile test.

Key words： metrology guided alignment angle deviator micro displacement laser collimation micro component

收稿日期: 2015-12-25 发布日期: 2017-09-27

PACS:	TB92
	TB931

基金资助:国家自然科学基金(51305120,51375136); 国家科技支撑计划资助项目(2011BAK15B07)

通讯作者: 王标 E-mail: wangbiaowb@163.com

作者简介: 杨恩臻(1990-), 女, 山东潍坊人, 合肥工业大学在读硕士研究生, 主要研究方向为微构件拉伸测试。yez726@163.com

引用本文:

杨恩臻,王标,宁晓旭,王永红. 微构件拉伸测试辅助引导对中测量系统设计[J]. 计量学报, 2017, 38(6): 671-675.
YANG En-zhen,WANG Biao,NING Xiao-xu,WANG Yong-hong. A Design of Auxiliary Alignment Measuring System for Micro Component Tension. Acta Metrologica Sinica, 2017, 38(6): 671-675.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2017.06.03 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2017/V38/I6/671