Analysis and Evaluation of AFM Uncertainty in Linewidth Measurement
HAN Guo-qiang1,2,3,CHEN Yu-qin1
1.School of Mechanical Engineering and Automatic, Fuzhou University, Fuzhou, Fujian 350108, China
2.State Key Laboratory for Manufacturing System Engineering, Xian Jiaotong University, Xi‘an, Shanxi Xi’an 710049, China
3.School of Physics and Information Engineering, Fuzhou University, Fuzhou, Fujian 350108, China
Abstract：The sources of linewidth measurement uncertainty of AFM type P47 are analyzed in details.A new model based on geometry shape of linewidth measurement is proposed.An uncertainty evaluation method is offered according to systematic analysis results in linewidth measurement.The measurement uncertainty component caused by traditional Si3N4AFM tip is about 5% of the total linewidth.Finally,the main measurement uncertainty source- AFM tip is determined.
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2012, Vol. 33 
