详细分析了P47型原子力显微镜线宽测量不确定度的来源,给出了基于几何形状的线宽测量模型,提出了线宽测量不确定度的评定路线和方法。确定了探针针尖引起的测量不确定度是AFM线宽测量不确定度的主要来源,并对其进行了定量分析。普通Si3N4探针针尖引起的不确定度分量约占线宽总量的5%。
Abstract
The sources of linewidth measurement uncertainty of AFM type P47 are analyzed in details.A new model based on geometry shape of linewidth measurement is proposed.An uncertainty evaluation method is offered according to systematic analysis results in linewidth measurement.The measurement uncertainty component caused by traditional Si3N4AFM tip is about 5% of the total linewidth.Finally,the main measurement uncertainty source- AFM tip is determined.
关键词
计量学 /
原子力显微镜 /
线宽 /
测量不确定度
Key words
Metrology /
Atomic force microscopy(AFM) /
Linewidth /
Measurement uncertainty
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基金
国家自然科学基金（90923001）;福建省教育厅项目（JA11031）;福州大学人才基金（022319）
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