The Establishment of 2m Length Measurement Primary Standard
YE Xiao-you1,GAO Hong-tang1,SUN Shuang-hua1,ZOU Ling-ding1,SHEN Xue-ping1,GAN Xiao-chuan1,CHANG Hai-tao2,ZHANG Xiao3
1.National Institute of Metrology, Beijing 100013,China
2.Beihang University,Beijing 100191,China
3.Zhejiang Institute of Metrology,Hangzhou, Zhejiang 310013,China
Abstract：The components and operation principle of 2m length measurement primary standard with laser interferometer is described.On the basis of the line space measurement, two localizing methods are studied for the multifunction applications of length measurement, the measures used to make sure nanometer accuracy are also described.Two opto-electronic microscopes symmetrically mounted are used for synchronously measuring;it can realize 2 m line space measurement with distance length extension between two microscopes.The system has the function of uniform position generating,so it can trigger displacement sensor for dynamic calibration and other applications.For measuring high quality of line scale,the minimum standard deviation of localization of one measurement of the line with good shape may be less than 10nm,the expanded measurement uncertainty is U=(20+40 L) nm （k=2）.
［1］Pieles H,et al.Interferometric Equipment for Precise Measurements of Line Standards and their Thermal Expansion［J］.MAPAN-Journal of Metrology Society of India, 1995, 10(2):65-73.
［2］高宏堂,叶孝佑,孙双花,等.空气弹簧隔振平台自动调平控制的研究［J］ .计量学报, 2009, 30(5A):107-110.
［3］孙双花,叶孝佑,高宏堂,等 .2 m比长仪测量滑板运动控制系统的实现［J］. 计量学报, 2008, 29(4A):123-126.
［4］高宏堂,叶孝佑,邹玲丁,等 . 2 m比长仪纳米级精度线间距测量系统的研究［J］. 计量学报, 2012, 33(2):97-103.
［5］叶孝佑,高宏堂,邹玲丁,等. 2 m比长仪纳米级高精度刻线自动瞄准系统［J］. 计量学报, 2010,31(6A):107-111.
2012, Vol. 33 
