All-fiber Displacement Measurement System Based on Extrinsic F-P Interferometry
MA Ying-han1,ZHANG Shu2,3,PI Lei2,YAN Han1,HU Jia-cheng1,SHI Yu-Shu2,3
1. Colloge of Metrology & Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China
2. National Institute of Metrology,Beijing 100029,China
3. Shenzhen Institute of Technology Innovation, National Institute of Metrology,Shenzhen,Guangdong 518107, China
Abstract：In order to solve the problem that the traditional separation mirror group interferometer is too large to be applied in the environment with limited space, all-fiber F-P interferometry displacement measurement technology is studied. According to the interference principle, the influence of different reflectivity conditions on the interference signal form is analyzed. When the reflectivity is 4%, the light intensity signal of multi-beam interference will be approximately a sine function, and the displacement measurement principle is verified by finite element simulation. An all-fiber displacement measurement system based on extrinsic F-P interferometry is designed and built. The experimental results show that the standard deviation of static noise voltage within 1min of the system is 23.3mV, and the linear correlation coefficient R2 of displacement measurement results between the system and commercial XL-80 laser interferometer is 1 within 1mm displacement, and the measurement repeatability of the system is better than that of commercial laser interferometer.
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2023, Vol. 44 
