Research for Calibration Comparison Method of Passive Deviceson-wafer Scattering Parameters
HUO Ye1,WU Ai-hua1,WANG Yi-bang1,LUAN Peng1,LIU Chen1,LIANG Fa-guo1,SUN Jing1,ZHANG Li-fei1,HU Hai-long2
1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051, China
2. China Xian Satellite Control Center, Xian, Shanxi 710043, China
Abstract：In order to solve the problem of deviation in the measurement results of on-wafer scattering parameters of passive devices due to different calibration methods, by taking the multi-line TRL calibration method with high accuracy as the reference benchmark, the differences between SOLT and LRRM calibration methods error terms are compared. The cascading relation of two port error terms is fully considered, the mathematical model of error term difference is derived, and the maximum deviation on-wafer scattering parameters of the passive devices are calculated by parameter conversion. The experimental analysis is carried out in the frequency range of 100MHz～67GHz. Compared with foreign calibration comparison methods, the linear amplitude deviation of the four scattering parameters of the same calibration method is ≤0.01. The research results show that the mentioned method can judge whether the test results of on-chip scattering parameters of passive devices are real and effective, and guide the selection of appropriate calibration methods during the test.
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2022, Vol. 43 
