Design of a High Linearity Two-Dimensional Uncoupled Nanometer Piezoelectric Displacement System
LUO Si-wei1,LE Yan-fen1,PENG Yang1,WU Jun-jie2,LEI Li-hua2,ZHANG Bo2,JIN Tao1
1. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
2. Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China
Abstract：A set of two-dimensional uncoupled nano-piezo displacement system with high linearity is designed. A charge control scheme for simultaneous linear operation of multiple piezoelectric actuators is proposed. The piezoelectric controller with ground configuration function. A T-shaped resistance network is introduced into the controller, which enables piezoelectric actuators with small capacitance to perform low-frequency linear operation. The mechanical structure of the displacement platform driven by piezoelectric ceramics is designed. The platform adopts a nested series structure to avoid coupling displacement. The stiffness and displacement analysis of the displacement platform are carried out through analytical methods and ANSYS Workbench finite element simulation. A set of interference displacement measurement system is built to verify the displacement, coupling error and linearity of the piezoelectric displacement stage. The experimental results show that the coupling error of the two-dimensional stage within the full stroke of the system is only 0.098% at the maximum, and the remaining trajectory deviation caused by hysteresis asymmetry can be reduced to 0.79%. The theoretical analysis and experiments verify the designed two-dimensional pressure. The electric displacement system can effectively suppress the coupling displacement and the positioning accuracy has been significantly improved.
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2021, Vol. 42 
