基于单稳频激光的端面距离微尺寸测量方法

doi:10.3969/j.issn.1000-1158.2021.02.03

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摘要搭建了一种用于端面距离微尺寸测量的干涉光路,分别以频率高度稳定的532nm波长激光和波长不确定度水平相对较差的633nm波长激光作为光源进行照射以获取干涉图样。使用电荷耦合器件(CCD)传感器获取干涉图样,采用数字图像处理手段清晰化干涉图样,并利用条纹的像素距离计算干涉条纹级次差的小数部分,用多波长的小数重合法计算端面间距。通过系统的软件部分,利用数字图像处理的手段对干涉图像的质量进行优化,在较为简单的实验条件下实现精度较高的端面距离微尺寸测量。

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	刘育彰
	高宏堂
	程银宝
	王中宇

关键词 ：计量学;微尺寸测量, 单稳频激光;端面距离;干涉条纹法;小数重合法;图像处理

Abstract：An interference system for the use of measuring micro transverse spacing is described. A highly frequency-stabilized laser of the wavelength of 532nm and a 633nm wavelength laser of relatively low level of wavelength uncertainty are brought into the system as optical sources. The charge coupled device(CCD) sensor is used in the system to get the interference graph. Some image processing methods are introduced to digitally enhance the interference image and calculate the fractional part of the interference fringe. The transverse distance is calculated by the method of exact fractions. By introducing some software technology to enhance the interference graph, a relatively high accuracy micro transverse spacing measurement can be realized with simple experimental condition.

Key words： metrology micro-dimension measurement single frequency-stabilized laser transverse spacing interference fringe method method of exact fractions image processing

收稿日期: 2019-11-08 发布日期: 2021-02-18

PACS:

TB921

基金资助:国家质检总局能力提升项目(24-ANL1804);工信部民机专项科研项目(MJZ-2018-J-70);四川省科技计划项目(2019YFSY0039)

通讯作者: 高宏堂(1976-),云南曲靖人,中国计量科学研究院副研究员,主要从事精密几何量测量研究。Email:htgao@nim.ac.cn E-mail: 13020051938@163.com

作者简介: 刘育彰(1995-),天津人,北京航空航天大学硕士研究生,主要研究方向为精密几何量测量。Email:13020051938@163.com

引用本文:

刘育彰,高宏堂,程银宝,王中宇. 基于单稳频激光的端面距离微尺寸测量方法[J]. 计量学报, 2021, 42(2): 144-149.
LIU Yu-zhang,GAO Hong-tang,CHENG Yin-bao,WANG Zhong-yu. Measurement of Micro Transverse Spacing Using Single Frequency-stabilized Laser. Acta Metrologica Sinica, 2021, 42(2): 144-149.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2021.02.03 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2021/V42/I2/144

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