用于微位移测量的迈克尔逊激光干涉仪综述

doi:10.3969/j.issn.1000-1158.2021.01.01

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摘要迈克尔逊干涉术测量微位移可实现纳米甚至更高的分辨力,并且具备能直接溯源至激光波长等诸多优点,是目前微位移测量的重要技术手段。以限制迈克尔逊干涉仪品质提高的非线性误差为主要切入点,对目前各种基于迈克尔逊干涉原理的激光干涉技术进行了分类介绍,主要讨论了微位移测量中实现高精度和高分辨率的干涉测量技术,最后展望了激光干涉法测量微位移的近期发展趋势。

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	王冬
	崔建军
	张福民
	闵帅博
	陈恺

关键词 ：计量学, 微位移测量, 迈克尔逊激光干涉仪, 激光干涉技术, 干涉仪非线性

Abstract：Michelson interferometry can achieve nanometer or even higher resolution, and can be directly traced to laser wavelength and many other advantages. It is an important technical measure of micro displacement measurement at present. Aiming at various laser interferometric techniques based on Michelson interferometer principle are classified and introduced. The interferometric measurement techniques to achieve sub-nanometer accuracy and resolution in micro-displacement measurement are mainly discussed. Finally, the development trend of laser micro displacement measurement is prosected in future.

Key words： metrology micro displacement measurement Michelson laser interferometer laser interferometry interferometer nonlinearity

收稿日期: 2019-08-21 发布日期: 2021-01-19

PACS:

TB921

基金资助:国家自然科学基金(51675497);北京市自然科学基金(3162034);国家重点研发计划专项(2017YFF0206305)

通讯作者: 崔建军(1977-),男,内蒙古乌兰察布人,中国计量科学研究院副研究员,博士,从事长度计量、激光测长、光纤传感技术研究。Email:ycuijj@163.com E-mail: cuijj@nim.ac.cn

作者简介: 王冬(1993-),男,河南三门峡人,天津大学在读硕士研究生,研究方向为长度计量、激光干涉技术。Email:18790708010@163.com

引用本文:

王冬,崔建军,张福民,闵帅博,陈恺. 用于微位移测量的迈克尔逊激光干涉仪综述[J]. 计量学报, 2021, 42(1): 1-8.
WANG Dong,CUI Jian-jun,ZHANG Fu-min,MIN Shuai-bo,CHEN Kai. Review of Michelson Laser Interferometer for Micro Displacement Measurement. Acta Metrologica Sinica, 2021, 42(1): 1-8.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2021.01.01 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2021/V42/I1/1

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