基于线激光传感器的工件尺寸测量系统的误差补偿方法

doi:10.3969/j.issn.1000-1158.2020.12.01

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摘要提出了一种基于线激光传感器的工件尺寸测量系统的误差补偿方法,利用坐标系投影和图像处理技术进行误差补偿。设定传感器坐标系OM-XMYMZM和设备坐标系O-XYZ,分析坐标轴夹角φ、δ、γ对工件尺寸坐标值X、Y、Z的误差,建立了基于φ、δ、γ在XOY、YOZ、XOZ平面上的投影角α、β、θ的误差补偿模型。利用图像处理技术测得α、β、θ,计算经过误差补偿的工件尺寸坐标值X′、Y′、Z′。对尺寸100mm×100mm×10mm的长方体工件进行测量实验,分别测量了长度、宽度、圆心距、圆直径、圆线距、台阶高度。测量结果表明:经误差补偿后的工件尺寸测量误差在40μm以内,优于未补偿前的520μm;均方根误差低于40μm,优于未补偿前的580μm。其中,圆心距误差补偿效果最显著,测量误差减小了560μm;圆直径误差补偿效果最不明显,测量误差减小了10μm。

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	张旭
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	沈小燕
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	李东升
	刘源

关键词 ：计量学, 线激光传感器, 工件尺寸测量系统, 误差补偿, 坐标系投影, 图像处理技术

Abstract：An error compensation method based on line laser sensor is proposed for workpiece size measurement. In the method, coordinate system projection and image processing technology is used. The sensor coordinate system OM-XMYMZM and the equipment coordinate system O-XYZ are set, and the errors of the coordinate angles φ,δ,γ on the workpiece size coordinate values X,Y,Z are analyzed, and the φ,δ,γ are established based on error compensation model for projection angles α,β,θ on the XOY,YOZ,XOZ planes. The image processing techniques are used to measure α,β,θ, and the error-compensated workpiece size coordinate values X′,Y′,Z′ are calculated. The measurement experiment is carried out on 100mm×100mm×10mm workpieces, and the length, width, center distance, circle diameter, round line spacing and step height are measured. The measurement results show that the error of workpiece size measurement after error compensation is within 40μm. which is better than the 520μm before uncompensated; root mean square error is less than 40μm, better than 580μm before uncompensated. Among them, the center distance error compensation effect is the most significant, the measurement error is improved by 560μm; the round diameter error compensation effect is the least obvious, and the measurement error is only increased by 10μm.

Key words： metrology line laser sensor workpiece size measurement system error compensation coordinate system projection image processing technology

收稿日期: 2019-10-28 发布日期: 2020-12-08

PACS:

TB921

基金资助:国家自然科学基金(51775529)

通讯作者: 沈小燕(1982-),女,浙江湖州人,中国计量大学副教授,从事光学检测、精密测试技术方面研究。Email:xyshen@cjlu.edu.com E-mail: lidongsheng@cjlu.edu.cn

作者简介: 张旭(1995-),女,黑龙江牡丹江人,中国计量大学硕士研究生,研究方向为几何量计量。Email:1004471479@qq.com

引用本文:

张旭,陈爱军,沈小燕,张瀚文,李东升,刘源. 基于线激光传感器的工件尺寸测量系统的误差补偿方法[J]. 计量学报, 2020, 41(12): 1449-1455.
ZHANG Xu,CHEN Ai-jun,SHEN Xiao-yan,ZHANG Han-wen,LI Dong-sheng,LIU Yuan. Error Compensation Method for Workpiece Size Measurement System Based on Line Laser Sensor. Acta Metrologica Sinica, 2020, 41(12): 1449-1455.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2020.12.01 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2020/V41/I12/1449

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