基于单稳频激光的端面距离微尺寸测量方法

刘育彰; 高宏堂; 程银宝; 王中宇

doi:10.3969/j.issn.1000-1158.2021.02.03

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计量学报 ›› 2021, Vol. 42 ›› Issue (2) : 144-149. DOI: 10.3969/j.issn.1000-1158.2021.02.03

几何量计量

基于单稳频激光的端面距离微尺寸测量方法

刘育彰¹,高宏堂^1,2,程银宝¹,王中宇¹

作者信息 +

Measurement of Micro Transverse Spacing Using Single Frequency-stabilized Laser

LIU Yu-zhang¹,GAO Hong-tang^1,2,CHENG Yin-bao¹,WANG Zhong-yu¹

Author information +

文章历史 +

摘要

搭建了一种用于端面距离微尺寸测量的干涉光路,分别以频率高度稳定的532nm波长激光和波长不确定度水平相对较差的633nm波长激光作为光源进行照射以获取干涉图样。使用电荷耦合器件(CCD)传感器获取干涉图样,采用数字图像处理手段清晰化干涉图样,并利用条纹的像素距离计算干涉条纹级次差的小数部分,用多波长的小数重合法计算端面间距。通过系统的软件部分,利用数字图像处理的手段对干涉图像的质量进行优化,在较为简单的实验条件下实现精度较高的端面距离微尺寸测量。

Abstract

An interference system for the use of measuring micro transverse spacing is described. A highly frequency-stabilized laser of the wavelength of 532nm and a 633nm wavelength laser of relatively low level of wavelength uncertainty are brought into the system as optical sources. The charge coupled device(CCD) sensor is used in the system to get the interference graph. Some image processing methods are introduced to digitally enhance the interference image and calculate the fractional part of the interference fringe. The transverse distance is calculated by the method of exact fractions. By introducing some software technology to enhance the interference graph, a relatively high accuracy micro transverse spacing measurement can be realized with simple experimental condition.

导出引用

刘育彰,高宏堂,程银宝,王中宇. 基于单稳频激光的端面距离微尺寸测量方法[J]. 计量学报. 2021, 42(2): 144-149 https://doi.org/10.3969/j.issn.1000-1158.2021.02.03

LIU Yu-zhang,GAO Hong-tang,CHENG Yin-bao,WANG Zhong-yu. Measurement of Micro Transverse Spacing Using Single Frequency-stabilized Laser[J]. Acta Metrologica Sinica. 2021, 42(2): 144-149 https://doi.org/10.3969/j.issn.1000-1158.2021.02.03

中图分类号： TB921

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