光谱共焦传感器校准方法对比分析

doi:10.3969/j.issn.1000-1158.2019.6A.005

摘要
图/表
参考文献
相关文章 (15)

全文: PDF (1295 KB) HTML (1 KB)
输出: BibTeX | EndNote (RIS)

摘要主要对光谱共焦传感器的校准时的误差进行研究。分别利用激光干涉仪与高精度测长机对光谱共焦传感器进行测量,用球面测头保证光谱共焦传感器的光路位于测头中心,以保证光谱共焦传感器的在测量时的安装精度,然后更换平面侧头,对光谱共焦传感器进行校准。用最小二乘法对测量数据进行处理,得到测量数据的非线性误差。结果表明:高精度测长机校准时的非线性误差为0.030%,激光干涉仪校准时的分析线性误差为0.038%。利用最小二乘法进行数据处理及非线性误差的计算,减小校准时产生的同轴度误差及光谱共焦传感器的系统误差,提高对光谱共焦传感器的校准精度。

	服务

	把本文推荐给朋友
	加入我的书架
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	闫勇刚
	刘志浩
	朱小平
	杜华
	李加福

关键词 ：计量学, 光谱共焦, 非接触测量, 误差分析, 校准

Abstract：The error in the calibration of the spectral confocal sensor is mainly studied. The spectral confocal sensor was measured by a laser interferometer and a high-precision length measuring machine respectively, and the spherical probe was used to ensure that the optical path of the spectral confocal sensor was located at the center of the probe to ensure the accuracy of the spectral confocal sensor during measurement, and then replace the planar side head to calibrate the spectral confocal sensor. The measurement data was processed by the least squares method to obtain a nonlinear error of the measured data. The results showed that the nonlinear error of the high-precision length measuring machine is 0.030%, and the analytical linear error of the laser interferometer is 0.038%. The least squares method was used for data processing and nonlinear error calculation, which reduced the coaxiality error generated during calibration and the systematic error of the spectral confocal sensor, and improved the calibration accuracy of the spectral confocal sensor.

Key words： metrology chromatic confocal non-contact measurement error analysis calibration

收稿日期: 2019-10-09

PACS:

TB921

基金资助:河南省高校基本科研业务费专项资金(NSFRF180332)

作者简介: 闫勇刚（1977-),男,河南孟州人,河南理工大学副教授,主要从事光学成像检测技术、激光干涉测量技术及人体生理信号检测技术及仪器开发。Email: yonggang_yan@hpu.edu.cn

引用本文:

闫勇刚, 刘志浩, 朱小平, 杜华, 李加福. 光谱共焦传感器校准方法对比分析[J]. 计量学报, 2019, 40(6A): 23-28.
YAN Yong-gang, LIU Zhi-hao, ZHU Xiao-ping, DU Hua, LI Jia-fu. Calibration and Comparison of a Spectral Confocal Sensor. Acta Metrologica Sinica, 2019, 40(6A): 23-28.

链接本文:

http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2019.6A.005 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2019/V40/I6A/23

1 ApparatusMicroscopy. Minsky M.US 3013467［P］. 1961-12.
2 马敬,齐月静,卢增雄,等. 光谱共焦传感器色散物镜设计［J］.中国激光,2019,46(7):219-225. MaJ, QiY J, LuZ X, et al. Spectral Confocal Sensor Dispersion Objective Design ［J］. China Laser, 2019, 46 (7): 219-225.
3 毕超,刘红光,徐昌语,等. 基于光谱共焦技术的叶尖间隙测量方法研究［J］.航空精密制造技术,2016,52(2):14-18. BiC, LiuH G, XuC Y, et al. Research on measurement method of tip clearance based on spectral confocal technology［J］. Aviation Precision Manufacturing Technology, 2016, 52(2): 14-18.
4 位恒政,王为农,任国营,等. 光谱共焦传感器探测误差的研究［J］.计量学报,2017,38(z1):94-97. WeiH Z, WangW N, RenG Y, et al. Research on detection error of spectral confocal sensor［J］.Acta Metrologica Sinica, 2017,38(z1):94-97.
5 朱万彬,曹世豪. 光谱共焦位移传感器测量透明材料厚度的应用［J］.光机电信息,2011,28(9):50-53. ZhuW B, CaoS H. Application of Spectral Confocal Displacement Sensor to Measure Transparent Material Thickness［J］. Opto-Electronics Information, 2011, 28(9): 50-53.
6 曹太腾. 基于三维数据精确测量的机器视觉系统［D］.武汉:武汉工程大学,2017.
7 沈小燕,崔廷,林杰,等. 膜式燃气表阀盖密封性检测研究［J］.机床与液压,2014,42(10):178-181. ShenX Y, CuiTg, LinJ, et al. Study on Sealing Test of Membrane Gas Meter Valve Cover［J］. Machine Tool & Hydraulics, 2014, 42(10): 178-181.
8 林杰俊. 二维纳米测量定位装置的研究［D］.杭州:中国计量学院,2013.
9 陈挺,周闻青,卢歆,等. 光谱共焦技术在精密几何量计量测试中的应用［J］.计测技术,2015,35(S1):4-6. ChenT, ZhouW Q, LuW, et al. Application of Spectral Confocal Technology in Precision Geometric Measurement ［J］. Measurement Technology, 2015, 35(S1): 4-6.
10 ChunB S, KimK, GweonD. Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope［J］. Review of Scientific instruments, 2009, 80(7): 073706.
11 王津楠. 光谱共焦位移传感器研究与设计［D］.哈尔滨:哈尔滨工业大学,2016.
12 RishikesanV, SamuelG L. Evaluation of Surface Profile Parameters of a Machined Surface Using Confocal Displacement Sensor［J］. Procedia Materials Science,2014,5:1385-1391.