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计量学报  2019, Vol. 40 Issue (6A): 17-22    DOI: 10.3969/j.issn.1000-1158.2019.6A.004
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AFM设定值对测量准确度和探针寿命的影响
唐莹, 曹丛, 张健, 赵东升
山东省计量科学研究院,山东济南250014
The Effects of Different Setpoint to Measuring Accuracy and Service Life of a Probe on AFM
TANG Ying, CAO Cong, ZHANG Jian, ZHAO Dong-sheng
Shandong Institute of Metrology, Jinan, Shandong 250014, China
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摘要 研究了不同模式下设定值对AFM成像质量、测量准确度、样品及探针磨损情况的影响。结果表明,接触模式下弯曲量设定越大,探针与样品相互作用力越大,噪声减小,成像质量提高,但是会对样品和探针造成较大磨损,降低测试测量准确度,一般表面起伏较大的硬样品适合此模式;轻敲模式下进针会有一个振幅设定,由此值开始,随着振幅设定减小,测量准确度和探针磨损程度先增加后减小,噪声和磨损均不大,适合于表面比较平滑的非粘性样品;智能模式下参数可自动调节,且对样品和探针的磨损较小,但是受噪音影响较大,测量数据较小时准确度偏低。
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唐莹
曹丛
张健
赵东升
关键词 计量学原子力显微镜扫描模式设定值探针磨损    
Abstract:The effects of different setpoints on image quality, measuring accuracy, wear pattern of probe and sample in different testing mode were investigated. The results indicated that in contact mode, the larger the setting of the bending amount, the greater the interaction force between the probe and the sample, the noise was decreased, the image quality was increased, however it caused great wear to the sample and the probe, and reduce the measurement accuracy. Generally, the hard sample with large surface fluctuation is suitable for this mode. In tapping mode, the needle set an amplitude, from the value starts, as the amplitude decreased, the measurement accuracy and probe wear degree increased firstly and then decreased, and the noise and wear were not large, so the mode suit for non sticky samples with smooth surface. In the intelligent mode, the parameters were adjusted automatically, and the wear of the sample and probe was small, but the influence by the noise was great and the accuracy was low when the measurement data was small.
Key wordsmetrology    atomic force microscope    testing mode    setpoint    probe wear pattern
收稿日期: 2019-09-30     
PACS:  TB921  
基金资助:科技部国家重点研发计划(2018YFF0212305)
作者简介: 唐莹(1986-),女,山东临沂人,山东省计量科学研究院工程师,硕士,主要从事纳米计量方向工作。Email:15098897835@163.com
引用本文:   
唐莹, 曹丛, 张健, 赵东升. AFM设定值对测量准确度和探针寿命的影响[J]. 计量学报, 2019, 40(6A): 17-22.
TANG Ying, CAO Cong, ZHANG Jian, ZHAO Dong-sheng. The Effects of Different Setpoint to Measuring Accuracy and Service Life of a Probe on AFM. Acta Metrologica Sinica, 2019, 40(6A): 17-22.
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