1.School of Instrument Sci & Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2.Department of Mechanical Engineering, National Taiwan University, Taipei 10617, China
Abstract：A high sensitivity touch trigger probe for Micro/Nano CMM has been designed. The principle and the structure of the probe were introduced,and the sensitivity and stiffness models were established. The optimal parameters conforming to the uniform sensitivity and uniform stiffness in 3D were obtained. The stiffness of the probe was verified by simulation. The stiffness, resolution and the stability of the probe were tested. The experimental results show that the probe has uniform stiffness (less than 1 mN/μm) in 3D and the resolution of the probe is higher than 50 nm . The drift of the probe is about 20 nm in 1.3 hours when the fluctuation of the environmental temperature is less than ±0.025 ℃.
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2016, Vol. 37 
