Development of Atomic Force Microscopy Measuring Head Based on Quartz Tuning Fork Probe
LIU Lei-hua1,2,GUO Tong1,LI Wei2,WANG He-qun2,GAO Si-tian2
1.State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100029, China
Abstract：A self-sensing atomic force microscope (AFM) measuring head is developed based on a commercial quartz turning fork probe. The measuring head is easy to integrate and it can detect the amplitude variations of the cantilever through the electrical signal instead of using optical detection components. A weak signal detection and parasitic capacitance compensation circuit is designed for the measuring head. The amplitude signal of the measuring head is obtained using a commercial lock-in amplifier. And on this base the force-distance curve and resolution of the measuring head in amplitude modulation mode is tested. Using the PID module in lock-in amplifier, the topography of the sample is measured in amplitude modulation mode. The results indicated that the sensitivity of the measuring head is 0.624 mV/nm, and the resolution of the measuring head can reach less than 2 nm.
刘雷华,郭彤,李伟,王鹤群,高思田. 基于石英音叉探针的原子力显微镜测头开发[J]. 计量学报, 2016, 37(3): 225-229.
LIU Lei-hua,GUO Tong,LI Wei,WANG He-qun,GAO Si-tian. Development of Atomic Force Microscopy Measuring Head Based on Quartz Tuning Fork Probe. Acta Metrologica Sinica, 2016, 37(3): 225-229.
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2016, Vol. 37 
