Abstract：The research of force metrology in the range from nanonewton to micronewton is an important orientation in international metrological researches at present. Up-to-date research achievements of the force standards, force sensors, reference cantilevers and traceable approaches in the range from nanonewton to micronewton in NIST, NPL, PTB and KRISS are described. A traceable hierarchy of micro-nano scale force metrology is put forward. It guarantees accuracy and consistency of dissemination for micro-nano mechanical properties testing in the field of advanced materials, biotechnology, microelectronics and etc.
胡刚. 微纳力值计量标准的研究和溯源体系的建立[J]. 计量学报, 2011, 32(5): 450-454.
Hu Gang. Research on Measurement Standards and Establishment of Traceable Hierarchy of Micro-nano Force Metrology. Acta Metrologica Sinica, 2011, 32(5): 450-454.
［1］Pratt J R, Kramar J A, Newell D B, et al. Review of SI Traceable force metrology for instrumented indentation and atomic force microscopy ［J］. Measurement Science and Technology, 2005, 16(11): 2129-2137.
［2］Leach R, Chetwynd D, Blunt L, et al. Recent advances in traceable nanoscale dimension and force metrology in the UK ［J］. Measurement Science and Technology, 2006, 17(13): 467-476.
［3］Nesterov V. Facility and methods for the measurement of micro and nano forces in the range below 10-5N with a resolution of 10-12N(development concept) ［J］. Measurement Science and Technology, 2007, 18(2): 360-366.
［4］Behrens I, Doering L, Peiner E. Piezoresistive cantilever as portable micro force calibration standard ［J］. Journal of Micromechanics and Microengineering, 2003, 13(4): S171-S177.
［5］Kim M S, Choi J H, Park Y K, et al. Atomic force microscope cantilever calibration device for quantified force metrology at micro-or nano-scale regime: the nano force calibrator（NFC) ［J］. Metrologia, 2006, 43(5): 389-395.
［6］Langlois E D, Shaw G A, Pratt J R, et al. Spring constant calibration of atomic force microscopy cantilevers with a piezosensor transfer standard ［J］. Review of Scientific Instruments, 2007, 78(9):093705.
［7］Gates R S, Pratt J R. Prototype cantilevers for SI-traceable nanonewton force calibration ［J］. Measurement Science and Technology, 2006, 17(10): 2852-2860.
［8］Cumpson P J, Hedley J. Accurate analytical measurements in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI ［J］. Nanotechnology, 2003, 14(12): 1279-1288.
［9］Pratt J R, Smith D T, Newell D B, et al. Progress toward Système International d’Unités traceable force metrology for nanomechanics ［J］. J Mater Res, 2004, 19(1): 366-379.
2011, Vol. 32 
