1. School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2. State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, Shannxi 710049, China
Abstract：Electric eddy sensor is widely used in industry because of its non-contact measurement and strong anti-interference.However,its accuracy is difficult to reach the level of a few micron.Interval optimization judgment principles is proposed on the bases of the accuracy analysis theory and the error correction technology,including “minimum interval number” principle and “maximum interval ranges” principle,to determine the optimal working ranges of electric eddy sensor and improve the sensor measurement accuracy. The above principles is applied to the commercial electric eddy sensor to obtain the precision promotion,the result shows that the original accuracy of ±10μm error is improved to ±4μm error in the best working range of eddy current sensor.
苗恩铭,王鑫,颜炎,杨睿嫦,费业泰. 电涡流传感器最佳工作区间确定方法研究[J]. 计量学报, 2011, 32(3): 239-243.
MIAO En-ming,WANG Xin,YAN Yan,YANG Rui-chang,FEI Ye-tai. Study on the Method for Finding Optimum Working Range of Electric Eddy Sensor. Acta Metrologica Sinica, 2011, 32(3): 239-243.
2011, Vol. 32 
