电涡流传感器最佳工作区间确定方法研究

苗恩铭; 王鑫; 颜炎; 杨睿嫦; 费业泰

doi:10.3969/j.issn.1000-1158.2011.03.10

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计量学报 ›› 2011, Vol. 32 ›› Issue (3) : 239-243. DOI: 10.3969/j.issn.1000-1158.2011.03.10

电涡流传感器最佳工作区间确定方法研究

苗恩铭^1,2,王鑫¹,颜炎¹,杨睿嫦¹,费业泰¹

作者信息 +

Study on the Method for Finding Optimum Working Range of Electric Eddy Sensor

MIAO En-ming^1,2,WANG Xin¹,YAN Yan¹,YANG Rui-chang¹,FEI Ye-tai¹

Author information +

文章历史 +

摘要

电涡流传感器因非接触测量、抗干扰力强等优点在生产中得到了广泛地应用,但其精度很难到达几个微米。根据精度分析理论,采用误差修正技术,提出“最小区间数”与“最大区间段”的工作区间优选原则,确定电涡流传感器的最佳工作区间,以提高传感器测量精度。应用该方法对商业电涡流传感器进行了精度标定,结果显示,将原有的电涡流传感器±10μm误差提升至最佳工作区间的±4μm精度。

Abstract

Electric eddy sensor is widely used in industry because of its non-contact measurement and strong anti-interference.However,its accuracy is difficult to reach the level of a few micron.Interval optimization judgment principles is proposed on the bases of the accuracy analysis theory and the error correction technology,including “minimum interval number” principle and “maximum interval ranges” principle,to determine the optimal working ranges of electric eddy sensor and improve the sensor measurement accuracy. The above principles is applied to the commercial electric eddy sensor to obtain the precision promotion,the result shows that the original accuracy of ±10μm error is improved to ±4μm error in the best working range of eddy current sensor.

导出引用

苗恩铭,王鑫,颜炎,杨睿嫦,费业泰. 电涡流传感器最佳工作区间确定方法研究[J]. 计量学报. 2011, 32(3): 239-243 https://doi.org/10.3969/j.issn.1000-1158.2011.03.10

MIAO En-ming,WANG Xin,YAN Yan,YANG Rui-chang,FEI Ye-tai. Study on the Method for Finding Optimum Working Range of Electric Eddy Sensor[J]. Acta Metrologica Sinica. 2011, 32(3): 239-243 https://doi.org/10.3969/j.issn.1000-1158.2011.03.10

中图分类号： TB92

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