1.Zhejiang Institute of Metrology, Hangzhou, Zhejiang 310013, China
2.Beijing Ponovo Power Co. LTD, Beijing 100098, China
3.Physikalische Technische Bundesanstalt, Braunschweig, D-38116, Germany
Abstract：The development and test of nanomechanical measurement methods and systems on the basis of Micro Electromechanical Systems(MEMS) is described. A MEMS-based nanoforce actuator is presented, which is developed on the basis of an electrostatic lateral comb-drive, mainly for use in material micro/nano tensile testing and atom force microscope. In order to increase the output force, a post-fabrication gap reduction method is introduced, so that the nanoforce actuator shows such features as small size, low drive voltage, high resolution (in the order of nN) and large actuation force (>1 mN), etc. Then the principle of these measurement systems, the design, the manufacture and the assembly of the MEMS as well as first test results and achieved performance parameters are described.
张志凯,滑晓欣,高赛,Konrad Herrmann. 基于微机电系统的纳米力学测量装置的研制[J]. 计量学报, 2012, 33(4): 303-307.
ZHANG Zhi-kai,HUA Xiao-xin,Gao Sai,KONRAD Herrmann. Development of Nanomechanical Measurement System on the Basis of Micro Electromechanical Systems. Acta Metrologica Sinica, 2012, 33(4): 303-307.
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2012, Vol. 33 
