Abstract：The micro-nano linewidth measurement technology on metrological ultraviolet microscope is that photovoltaic effect of photomultiplier tubes is used to convert the optical signal to electric signal and extract the outline of linewidth by the subsequent signal acquisition circuit. Using some precision positioning device,such as laser interferometer, a linewidth measurement system is builded to measure a standard sample which the linewidth is 3 μm. The linewidth measurement result is 3.025 μm, differ with nominal value 25 μm. Experiment shows that the method can accurately obtain the border of the linewidth , it can achieve accurate measurement of linewidth.
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2015, Vol. 36 
