计量型紫外显微镜微纳米线宽测量技术的研究

尹传祥; 高思田; 赵贤云; 李琪; 施玉书; 李伟; 卢荣胜

doi:10.3969/j.issn.1000-1158.2015.06.04

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计量学报 ›› 2015, Vol. 36 ›› Issue (6) : 575-578. DOI: 10.3969/j.issn.1000-1158.2015.06.04

计量型紫外显微镜微纳米线宽测量技术的研究

尹传祥¹,高思田²,赵贤云¹,李琪²,施玉书²,李伟³,卢荣胜¹

作者信息 +

The Research of Micro-Nano Linewidth Measurement Technology on Metrological Ultraviolet Microscope

YIN Chuan-xiang¹,GAO Si-tian²,ZHAO Xian-yun¹,LI Qi², SHI Yu-shu²,LI Wei²,LU Rong-sheng¹

Author information +

文章历史 +

摘要

计量型紫外显微镜微纳米线宽测量技术是利用光电倍增管的光电转换效应,将线宽的光学信号转换为电信号,并利用后续信号采样处理电路,提取出线宽的轮廓信号。利用激光干涉仪等精密定位装置,搭建了一套线宽测量系统,对线宽标称值为3 μm的标准样板进行测量,得到的线宽测量值为3.025 μm,与标称值仅相差25 nm。实验表明:该方法可以准确地获取线宽的边界信号,实现线宽的准确测量。

Abstract

The micro-nano linewidth measurement technology on metrological ultraviolet microscope is that photovoltaic effect of photomultiplier tubes is used to convert the optical signal to electric signal and extract the outline of linewidth by the subsequent signal acquisition circuit. Using some precision positioning device,such as laser interferometer, a linewidth measurement system is builded to measure a standard sample which the linewidth is 3 μm. The linewidth measurement result is 3.025 μm, differ with nominal value 25 μm. Experiment shows that the method can accurately obtain the border of the linewidth , it can achieve accurate measurement of linewidth.

导出引用

尹传祥, 高思田, 赵贤云, 李琪, 施玉书, 李伟, 卢荣胜. 计量型紫外显微镜微纳米线宽测量技术的研究[J]. 计量学报. 2015, 36(6): 575-578 https://doi.org/10.3969/j.issn.1000-1158.2015.06.04

YIN Chuan-xiang,GAO Si-tian,ZHAO Xian-yun,LI Qi, SHI Yu-shu,LI Wei,LU Rong-sheng. The Research of Micro-Nano Linewidth Measurement Technology on Metrological Ultraviolet Microscope[J]. Acta Metrologica Sinica. 2015, 36(6): 575-578 https://doi.org/10.3969/j.issn.1000-1158.2015.06.04

中图分类号： TB921

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