Abstract：A two-dimensional nanometer displacements using piezoelectric ceramic (PZT) to drive overlay of flexure hinge mechanism is developed. The structure of displacement system is introduced and the job of displacement stiffness is analyzed. The theoretical and simulation result error is below 6.3%. A laser interferometer based on the principles of linear interferometer measurement system is constructed, and the layout and displacement measurement principle of the measurement system is described.Then the nanometer displacement itinerary and location accuracy is measured. The results show that within the trips of 100 μm, the x axis and y axis of tests displacement is 99.6 μm and 97.7 μm. The sources of error of the test system is analyzed and the uncertainty of the measurement system is assesed, and the combined standard uncertainty of measurement system of the x axis and the y axis is 10.04 nm and 13.93 nm.
［1］Smith A R, Gwo S, Shih C K. A new high-resolution two-dimensional micropositioning device for scanning probe microcopy applications ［J］. Review of Scientific Instruments, 1994, 65(10):3216-3219.
［2］Garratt J D, Bottomley S C. Technology transfer in the development of a nano-topographic instrument ［J］. Nanotechnology, 1990, 1(4): 38-43.
［3］Yeh H C, Ni W T, Pan S S. Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry ［J］. Control Engineering Practice, 2005, 13(5): 559-566.
［4］王建林,胡小唐.纳米定位技术研究现状［J］.机械设计与研究,2000, 16(1):43-44.
［5］赵克功,高思田,徐毅.计量型原子力显微镜［J］.计量学报,1998, 19(1):1-7.
［6］马立,荣伟彬,孙立宁.三维纳米级微动工作台的设计与分析［J］.光学精密工程,2006,14(6):1017-1024.
［7］孟兆新,胡乃文.三维精密定位工作台的控制系统的研究［J］.电机与控制学报,2005,9(2):148-150.
［8］李蓓智,杨永金,杨建国,等.精密微位移工作台的设计与性能分析［J］.机械设计与研究,2008,24(4);41-44.
［9］袁哲俊,王先逵.精密和超精密加工技术［M］. 北京:机械工业出版社, 1999.
［10］于靖军,裴旭,毕树生,等.柔性铰链机构设计方法的研究进展［J］.机械工程学报,2010,46(13):2-9.
［11］徐盛林,陈耿.精密超精密定位技术及其应用［J］.中国机械工程, 1997, 8(4): 73-75.
［12］夏尊凤,戴娟.2自由度柔性构件运动特性研究［J］.机械设计与制造, 2013,(2):235-237.
［13］Eun J H, Kyung S M, Shin H S, et al. Optimal design of a flexure-hinge precision stage with a lever［J］. Journal of Mechanical Science and Technology, 2007, 21(4): 616-623.
2015, Vol. 36 
