Comparative Study on the Calibration Methods of the Indenter Area Function of the Instrumented Nanoindentation
LI Zheng-wei1,TAO Xing-fu2,SHU Xue-feng1,REN Ling-ling2
1.Research Institute of Applied Mechanics and Biomedical Engineering, Taiyuan University of Technology, Taiyuan, Shanxi 030024, China;
2.National Institute of Metrology, Beijing 100029, China
Abstract：The indenter area function and the machine compliance of the instrumented nanoindentation are calibrated directly by atomic force microscope and indirectly by indentation of the standard fused silica, respectively. The calibration results of the two methods were applied to the indentations of the standard fused silica and the polycarbonate. The indentation results show, at low indentation depth, the hardness and the reduced modulus measured by the direct calibration method are more accurate than that of calibrated by the indirect method. However, the results of the two methods have small difference at high indentation depth.
黎正伟,陶兴付,树学峰,任玲玲. 纳米压痕仪的压头面积函数校准方法的比较研究[J]. 计量学报, 2015, 36(4): 403-407.
LI Zheng-wei,TAO Xing-fu,SHU Xue-feng,REN Ling-ling. Comparative Study on the Calibration Methods of the Indenter Area Function of the Instrumented Nanoindentation. Acta Metrologica Sinica, 2015, 36(4): 403-407.
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2015, Vol. 36 
