基板玻璃翘曲度的精密随动测量技术

doi:10.3969/j.issn.1000-1158.2013.03.05

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摘要针对大尺寸基板玻璃翘曲度的精密测量,提出基于实时整定多项式权值的广义最小方差（RAPW_GMV）随动扫描测量方法。主要思想是根据实时估计的被控对象参数及RAPW_GMV输出误差修正多项式的权值,实现测头自动跟踪扫瞄测量。实验证明,该方法小位移精密测头自动测量未知曲面的跟踪误差优于0.02 mm,实现了基板玻璃翘曲度的快速、高精度自动测量。

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	邵伟
	郭俊杰
	常婷
	刘冲

关键词 ：计量学, 翘曲度, 随动扫描测量, RAPW_GMV控制, 实时修正

Abstract：For measuring warpage of large size substrate glass,a generalized minimum variance principle base on real-time adjusting polynomial weights (RAPW_GMV) automatic scanning method is introduced.Its main idea is based on the real-time estimation of the parameters of controlled object and RAPW_GMV output to correction polynomial weights to fulfill the automatic tracking measuring of probe.The experimental results confirm the tracking error of automatic measuring of unknown surface is superior to 0.02mm, and the automatic measuring of substrate glass warpage with fast and high precision is realized.

Key words： Metrology Warpage Following scanning RAPW_GMV control Real-time adjusting

基金资助:陕西省教育厅科研计划项目（12JK0662）

作者简介: 邵伟（1977-）,男,湖北随州人,西安理工大学讲师,博士。主要研究方向为智能检测与控制理论。swlxm@163.com

引用本文:

邵伟,郭俊杰,常婷,刘冲. 基板玻璃翘曲度的精密随动测量技术[J]. 计量学报, 2013, 34(3): 221-215.
SHAO Wei,GUO Jun-jie,CHANG Ting,LIU Chong. Accurately Following Measuring Technique for Warpage of Substrate Glass. Acta Metrologica Sinica, 2013, 34(3): 221-215.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2013.03.05 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2013/V34/I3/221