Abstract：The cumulative error correction method through auto-measuring grating pitch is proposed. The grating pitch measurement is based on the high order cumulants to estimate time delay between two moiré signals of grating sensor, this method can realize the measurement of each grating pitch, and reduce cumulative error by correcting each grating pitch error, which is the foundation for the realization of long range and high precision measurement. The experiment uses the grating sensor with the length of 500 mm, and 50 lines/mm, which includes the 25000 grating lines, and realizes grating pitch measurement resolution of 3nm, which reaches to the nanometer level. Anti-interference ability of the method is strong, which is suitable for field application on production.
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2013, Vol. 34 
