Study on Mass Detectable Quantity of Quartz Crystal Microbalance
CHEN Yan1,HUANG Xian-he2
1.School of Information Engineering, Southwest University of Science and Technology, Mianyang, Sichuan 621010, China;
2.School of Automation, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China
Abstract：The vibrational displacement on crystal surface is analyzed on the basis of mass detection principle of quartz crystal microbalance,leading to the conclusion that the physical quantity which determines the mass sensitivity in every point on the electrode surface of the crystal is the acceleration of the crystal vibration in that point. Based on this conclusion,the Butterworth-Van Dyke equivalent circuit of crystal resonator was employed to obtain the computational method of oscillation amplitude on the surface of the quartz crystal microbalance resonator,thus obtaining the average detectable mass of quartz crystal microbalance in the overall detection process. The experimental result was generally in line with theoretical value (at the picogram level) when experimented on a 10MHz quartz crystal microbalance.
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2015, Vol. 36 
