基于反向共轴的大口径平面光学元件面形测量

doi:10.3969/j.issn.1000-1158.2021.12.04

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摘要提出了一种基于反向共轴的大口径平面光学元件面形测量方法。将双位移传感器反向共轴线扫描测量模式和多角度旋转三面互检技术结合,借助直线长导轨有效扩大平面光学元件测量口径,同时测量过程中不需要使用标准平晶,避免引入标准平晶参考面不确定度分量,测量结果直接溯源到激光波长基准。利用该测量方法对3块400mm口径光学平晶进行面形测量,验证了该测量方法的可行性。

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	赵彦龙
	李加福
	朱小平
	杜华
	陈爱军
	胡佳成

关键词 ：计量学;面形测量;光学元件, 大口径平面;反向共轴;双位移传感器, 三面互检

Abstract：A surface measurement method based on reverse coaxial mode for large aperture plane optical elements is proposed. It combines the reverse coaxial line-scanning measurement mode of dual displacement sensors with three-flat test technology of multiple angle rotation. It effectively expands the measurement aperture of plane optical elements with the help of linear long guide rails. At the same time, it does not need to use a standard flat crystal during the measurement process, which can avoid introducing the uncertainty component of the reference flat of the standard plane crystal. The measurement results are directly traceable to the laser wavelength reference. The surface measurement of three 400mm diameter optical plane crystals is carried out using the measurement method, and the feasibility of the measurement method is verified through experiments.

Key words： metrology surface measurement optical elements large aperture surface reverse coaxial mode dual displacement sensors three-flat test

收稿日期: 2020-12-10 发布日期: 2021-12-06

PACS:

TB92

基金资助:国家市场监督管理总局质量技术基础能力建设专项(ANL1822);重大科学仪器设备开发重点专项(24-YQKFB1803-1)

通讯作者: 朱小平(1967-),男,福建连城人,中国计量科学研究院副研究员,主要从事膜厚及表面形貌测量技术研究。Email: zhuxp@nim.ac.cn E-mail: zhuxp@nim.ac.cn

作者简介: 赵彦龙(1994-),男,河南洛阳人,中国计量大学硕士研究生,研究方向为几何量计量。Email: ZylMessage@163.com

引用本文:

赵彦龙,李加福,朱小平,杜华,陈爱军,胡佳成. 基于反向共轴的大口径平面光学元件面形测量[J]. 计量学报, 2021, 42(12): 1570-1577.
ZHAO Yan-long,LI Jia-fu,ZHU Xiao-ping,DU Hua,CHEN Ai-jun,HU Jia-cheng. Surface Measurement Method Based on Reverse Coaxial Mode for Large Aperture Plane Optical Elements. Acta Metrologica Sinica, 2021, 42(12): 1570-1577.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2021.12.04 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2021/V42/I12/1570

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