Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy
ZHANG Hua-kun1, GAO Si-tian1,2, LI Wei2, SHI Yu-shu2, WANG He-qun2
1.School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei,Anhui 230009, China;
2. National Institute of Metrology, Beijing 100029, China
Abstract：Dual probes alignment measurement can virtually eliminate the effect of tip shape of traditional atomic force microscopy (AFM) on critical measurement (CD). Two tips (probe A and probe B) need contact to each other before measurement to establish a zero reference point. A method of progressive two-dimensional scanning is used to realized dual-probe nanoscale alignment. Firstly, it will align two probes to within 1μm through vision guidance. Secondly, the two probes continue to close, probe B is scanned by probe A in plane XOZ while reducing the scanning range and scanning step gradually to get the nanometer coordinate of probe B (YB，ZB). Lastly, the probe A will be move to YB and ZB in X and Z directions respectively, untill the probe A moves to touch the probe B in X direction. Results indicated that this method can effectively align dual probes, and the alignment accuracy is 10 nm.
张华坤, 高思田, 李伟, 施玉书, 王鹤群. 双探针原子力显微镜针尖对准方法研究[J]. 计量学报, 2015, 36(1): 1-5.
ZHANG Hua-kun, GAO Si-tian, LI Wei, SHI Yu-shu, WANG He-qun. Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy. Acta Metrologica Sinica, 2015, 36(1): 1-5.
［1］ 高思田，王春艳，叶孝佑，等.纳米技术与纳米计量［J］.现代计量测试，2000，(1)：3-12 .
［2］ 卢明臻，高思田，杜华，等.计量型原子力测头用于纳米台阶高度样板的测量［J］.计量学报， 2008, 29(3): 193-197.
［3］ Dai G L, Wolff H, Pohlenz P, et al. Atomic force probe for sidewall scanning of nano and microstructures［J］. Applied physics letters, 2006, 88(17): 171908.
［4］ Dai G L, Heidelmann M, Kübel C, et al. Reference nano-dimensional metrology by scanning transmission electronmicroscopy［J］. Measurement Science and Technology, 2013, 24(8):085001.
［5］ Solares S D. Characterization of deep nanoscale surface trenches with AFM using thin carbon nanotube probes in amplitude-modulation and frequency-force-modulation modes［J］. Measurement Science and Technology, 2008, 19(1): 015503.
［6］ Mancevski V, McClure P F. Development of a dual-probe CaliperTM CD-AFM for near model-independent nanometrology［C］//SPIE. Metrology, Inspection and Process Control for Microlithography XVI， Santa Clara, US, 2002, 83-91.
［7］ Akiyama T, Staufer U, Rooij N F, et al. Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy［J］. Review of Scientific Instruments, 2003, 74(1): 112-117.
［8］ Akiyama T, Rooij N F, Staufer U, et al. Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy［J］. Review of Scientific Instruments, 2010, 81(6): 063706.
［9］ Zhang H K, Gao S T, Lu M Z, et al. Dual AFM probes alignment based on vision guidance［C］//ICMI. Sixth International Symposium on Precision Mechanical Measurements, Guiyang, China, 2013, 891627.
［10］ Giessibl F J. Advances in atomic force microscopy［J］. Review of Modern Physics, 2003, 75(3): 949-983.
2015, Vol. 36 
