Abstract：Thermoreflectance includes two major procedures, namingly CTR calibration and temperature measurement. Several measured quantities and influencing factors are involved in each procedure. Error analysis on measured quantities involved with CTR calibration and temperature measurement procedure were present. Moreover, fixed bias on CCD count and drift of light source and camera responsiveness were included in the analysis as well. Approximate calculation with typical parameters were carried on according to the result of the analysis, and the discussion were made can provide some reference for the design, construction and application of the CCD-based thermoreflectance systems.
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2020, Vol. 41 
