原子力显微镜（AFM）对样品进行测量时,探针针尖与样品表面接近过程中的微观作用力探测是实现样品形貌准确测量的基础。本文基于音叉式探针的特性建立探针针尖与样品表面接近过程中的动力学方程,并利用simulink软件模拟了上述过程中探针悬臂振幅响应情况。自主搭建了基于音叉探针的接近曲线检测装置,编写位移系统控制程序和锁相放大器数据采集程序,在调幅模式下获得探针在不同激励电压下的接近曲线,其形式与仿真相符。研究结果将为音叉式原子力显微系统的搭建及优化反馈控制的设计提供扫描基准参考。
Abstract
In the study of atomic force microscopy, the micro-force detection in the approaching process between the tip and the sample is the basis for accurate measurement of the sample morphology. A dynamic equation was established based on the characteristics of tuning fork probe and Simulink software was used to simulate the amplitude response. Experimental device of approaching curve and program of controlling displacement system and acquiring data from lock-in amplifier were designed independently. In the AM mode, the curves under different excitation voltages were obtained. Under the excitation of 25, 50, 75 and 100mV, the working distance of the probe is 4.12,5.1,5.95,7.6nm respectively, and the forms are in conformity with the simulation.
关键词
计量学 /
原子力显微镜 /
接近曲线 /
Simulink /
音叉探针
Key words
metrology /
atomic force microscopy /
approaching curve /
Simulink /
tuning fork probe
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基金
国家重点研发计划(2016YFF0200602); 国家重点研发专项(2016YFA0200901)
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