1. College of Mechanical and Electronic Engineering, Shandong University of Science and Technology,Qingdao, Shandong 266590, China
2. Laboratory of Micro/Nano Measurement, Shanghai Institute of Measurementand Testing Technology, Shanghai 201203, China
Abstract：The microscopic vision technology is used to automatically detect the roundness of microspheres with the optimization algorithm. The grabbed image of microsphere is acquired by the charge coupled device (CCD) of measuring microscope. The image is enhanced based on the principle of maximum information entropy. There is a algorithm is used to split image which proceed non-maximum suppression of the gradient and iterative. Then the roundness of microspheres by using least square circle fitting is obtained after trace pick-up. The method avoids the loss of some information of the image edge and the reduction of detection accuracy due to filtering processing. By measuring the roundness error of 0.5mm microspheres, it is proved that the method of edge detection and trace pick-up can effectively suppress the influence of noise interference and achieve the accurate location of the target edge. The relative error between the roundness of microspheres obtained by this method and the one of calibrated microspheres is within 0.17%, which could achieved the purpose of effective detection of roundness.
陈厚瑞,蔡潇雨,魏佳斯,李源,于志豪. 基于显微视觉的微球圆度测量方法研究[J]. 计量学报, 2019, 40(5): 770-775.
CHEN Hou-rui,CAI Xiao-yu,WEI Jia-si,LI Yuan,YU Zhi-hao. Research on Measurement for Roundness of Microspheres Based on Micro-vision. Acta Metrologica Sinica, 2019, 40(5): 770-775.
［1］Claverley J D. Leach R K. A vibrating micro-scale CMM probe for measuring high aspect ratio structures ［J］. Microsystem Technologies, 2010, 16(8): 1507-1512.
［2］简黎, 雷李华, 李东升, 等. 基于小波包络提取法的白光干涉测量系统 ［J］. 微纳电子技术, 2015, 52(9): 586-591.
Jian L, Lei L H, Li D S, et al. White light interference measuring system based on the wavelet envelope extraction method ［J］. Micronanoelectronic Technology, 2015, 52(9): 586-591.
［3］张华坤,高思田,李伟. 原子力显微镜的双探针接触测量研究［J］.计量学报,2016,37(1):1-5.
Zhang H K, Gao S T, Li W. The contact measuring head of in dual-probe atomic force microscope［J］. Acta Metrologica Sinica,2016,37(1):1-5.
［4］戴昌盛. 基于显微视觉的微球质量检测与筛选方法研究 ［D］. 哈尔滨: 哈尔滨工业大学, 2016.
Dai C S. Research on vision-base methods for quality measurement and selection of microspheres ［D］. Harbin: Harbin Institute of Technology, 2016.
［5］何小嵩. 基于显微视觉的微球参数检测与转移控制的研究 ［D］. 哈尔滨: 哈尔滨工业大学, 2017.
He X S. Research onparameter detection and transfer control method of microspheres based on microvision ［D］. Harbin: Harbin Institute of Technology, 2017.
［6］林王兵, 许燕, 韩飞, 等. 实验室环境下的边缘检测技术研究综述 ［J］. 软件, 2015, (9): 29-32.
Lin W B, Xu Y, Han F, et al. Review of Image Edge Detection Algorithm in Lab ［J］. Computer Engineering and Software, 2015, (9): 29-32.
［7］Xie S, Tu Z. Holistically-Nested Edge Detection ［J］. International Journal of Computer Vision, 2015, 125 (1-3): 3-18.
［8］Park D, Park H, Han D K, et al. Single image dehazing with image entropy and information fidelity ［C］// IEEE International Conference on Image Processing, Quebec,Canada,2015: 4037-4041.
［9］孙路, 毕笃彦. 基于信息熵的图像分割阈值迭代改进算法 ［J］. 计算机应用与软件, 2008, 25(10): 225-238.
Sun L, Bi D Y. The improvediterative algorithm based on entropy for image threshold segmentation ［J］. Computer Applications and Software, 2008, 25(10): 225-238.
［10］李俊山, 李旭辉, 朱子江. 数字图像处理 ［M］. 北京: 清华大学出版社,2017.
［11］王淑青, 姚伟, 陈进, 等. 基于直方图均衡化与形态学处理的边缘检测 ［J］. 计算机应用与软件, 2016, 33(3): 193-196.
Wang S Q, Yao W, Chen J, et al. Image edge detection based on histogram equalization and morphology processing ［J］. Computer Applications and Software, 2016, 33(3): 193-196.
［12］Cao W, Kiyono S, Nomura T. A new multiprobe method of roundness measurements ［J］. Precision Engineering, 1996, 19(1): 37-45.
［13］LI X, Wang Z Y, WU X H, et al. An Canny Edge Detection Algorithm Base on Improved Non-Maximum Suppression ［J］. Journal of Chengdu University of Information Technology, 2011, (5): 564-569.
［14］邓健男, 安志勇, 祁金秋, 等. 一种高精度小孔圆度检测方法研究 ［J］. 长春理工大学学报(自然科学版), 2014, (1): 58-60.
Deng J N, An Z Y, Qi J Q, et al. A high precision detection method for hole roundness ［J］. Journal of Changchun University of Science and Technology, 2014, (1): 58-60.
［15］刘庆民,张蕾,吴立群, 等. 基于机器视觉的非均匀分布点圆度误差评定［J］. 计量学报, 2016, 37(6): 563-566.
Liu Q M, Zhang L, Wu L Q, et al.Roundness Error Evaluation of Non-uniformly Distributed Data Points Based on Machine Vision［J］. Acta Metrologica Sinica, 2016, 37(6): 563-566.
［16］Paguio R R, Paguio S P, Frederick C A. Improvingthe yield of target quality Omega size PAMS mandrels by modifying emulsion componets ［J］. Fusion Science and Technology, 2006, 49: 743-749.
［17］Norimatsu T, Takagi M, Takaki T, et al. Recent research on target fabrication for up-coming projects ［J］. Fusion Engineering and Design, 1999, 44: 449-459.
2019, Vol. 40 
