Abstract：A traceable atomic force probe microscope based on white light interference is developed. A robust white light interference zero-order fringe postioning algorithm is presented and a high-resolution displacement measurement system is established. On basis of above work, a probe calibration method is proposed to realize traceable measurement for micro-nano surface. A standard grating (step height: (21.4±1.5) nm) is tested 10 times under the same conditions, the measurement average value is 21.56 nm and the standard deviation is 0.51 nm. And a three-dimensional characteristic sample (step height: 150 nm) is used for 3D measurement. The accuracy and stability of the developed instrument have been verified by the experiments.
［1］Binnig G, Quate C F, Gerber C. Atomic force microscope［J］. Physical Review Letters, 1986, 56(9): 930-932.
［2］汪雅丽,熊艳艳,高思田,等. 用于音叉式原子力显微镜的探针制备［J］.计量学报, 2017, 38(1):43-46.
Wang Y L, Xiong Y Y, Gao S T, et al. Preparation of Probe Tips Applied to Tuning Fork Atomic Force Microscopy［J］. Acta Metrologica Sinica, 2017, 38(1):43-46.
［3］Eves B J. Design of a large measurement-volume metrological atomic force microscope (AFM)［J］. Measurement Science & Technology, 2009, 20(20): 84003-84005.
［4］Jacobsen S N, Wallenberg L R, Helmersson U, et al.Evaluation of Intermittent Contact Mode AFM Probes by HREM and Using Atomically Sharp CeO2 Ridges as Tip Characterizer［J］. Langmuir: The ACS Journal of Surfaces and Colloids, 2000, 16(15): 6267-6277.
［5］Boukellal Y, Ducourtieux S. Implementation of a four quadrant optic fibre bundle as a deflection sensor to get rid of heat sources in an AFM head［J］. Measurement Science & Technology, 2015, 26(9):095403.
［6］Sader J E, Lu J, Mulvaney P. Effect of cantilever geometry on the optical lever sensitivities and thermal noise method of the atomic force microscope［J］. Review of Scientific Instruments, 2014, 85(11): 113702-6.
［7］王淑珍,谢铁邦,常素萍.复合型超精密表面形貌测量仪［J］.光学精密工程, 2011, 19(4):828-835.
Wang S Z, Xie T B, Chang S P. Combined profilometer for ultra-precision surface topography［J］. Optics and Precision Engineering, 2011, 19(4): 828-835.
［8］郭鑫,施玉书,皮磊,等. Mirau干涉型微纳台阶高度测量系统的研究［J］. 计量学报, 2017, 38(2):141-144.
Guo X, Shi Y S, Pi L, et al. Research on Micro/nano Step Height Measurement System of Mirau Interference［J］. Acta Metrologica Sinica, 2017, 38(2):141-144.
［9］王洪斌,王世豪,籍冰朔,等.基于改进多阈值小波包的去噪算法及应用［J］.计量学报, 2016, 37(2):205-208.
Wang H B, Wang S H, Ji B S, et al. An Improved Multiple Threshold Wavelet Packet De-noising Algorithm and Its Application［J］. Acta Metrologica Sinica, 2016, 37(2): 205-208.
［10］刘冬梅,赵宇明.高动态范围图像梯度压缩算法［J］.计算机工程, 2009, 35(20):210-211.
Liu D M, Zhao Y M. Gradient Compression Algorithm of High Dynamic Range Image［J］. Computer Engineering, 2009, 35(20): 210-211.
［11］张建国,徐科军,董帅,等.基于希尔伯特变换的科氏质量流量计信号处理方法研究与实现［J］.计量学报, 2017, 38(3):309-314.
Zhang J G, Xu K J, Dong S, et al. Study and Implementation of Signal Processing Method for Coriolis Mass Flowmeter Based on Hilbert Transform［J］. Acta Metrologica Sinica, 2017, 38(3): 309-314.
［12］王凤鹏,邹万芳,尹真,等.希尔伯特变换实时全息干涉条纹相位提取［J］.光电工程, 2009, 36(4):92-96.
Wang F P, Zou W F, Yin Z, et al. Phase Extracting for Real-time Holographic Interferometry Fringe Pattern Based on Hilbert Transform［J］.Opto-Electronic Engineering, 2009,36(4):92-96.
［13］ISO 5436-1:2000, Geometric Product Specification(GPS)-Surface texture: profile method-calibration-Part 1: Measurement standards［S］.
2019, Vol. 40 
