Simiulation of AFM Scanning Process and Tip Shape Estimation
SHI Yu-shu1,2,LIAN Xiao-yi2,WANG Yi-xuan3,HUANG Lu2,DONG Ming-Li3,HU Xiao-dong1,GAO Si-tian2
1.State Key Laboratory of Precision Testing Technology and Instruments, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100192, China
3.Instrument Science and Optoelectronic Engineering College,
Beijing Information Science and Technology University, Beijing 100192, China
Abstract：To accurate measure the line widths of nano-grid and step structure is the hottest issues in metrology domain. AFM can be used to obtain the three-dimensional topographic information of the above structure, but the scanned image is the result of the interaction between the shape of the tip and the surface morphology of the sample. This interaction often leads to line width edge measurement distortion. To more accurately obtain the surface topography of the sample, firstly, the shape of the tip needs to be reconstructed, and then the distortion effect brought by the tip topography is eliminated as much as possible from the scanned image. Based on the blind reconstruction theory of mathematical morphology, Matlab was used to simulate the stepped sample surface scanned by different shape parameters of tips, the influences of the probe tip shape on the scanning results were evaluated, and got the initial realization of probe tip shape reconstruction based on measuring rough surface.
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2019, Vol. 40 
