高精度微孔测量探头

doi:10.3969/j.issn.1000-1158.2018.05.02

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摘要对高精度探头的研究和发展进行了叙述,介绍了所研制的一款由一个二维角度传感器、一个弹性机构和一个自制的微球形钨探针组成的微孔测量探头。对探头的刚度和重复性分别进行了仿真验证和实验测试,结果表明:该探头在三维方向上的刚度均小于0.4 mN/μm,重复性均优于20 nm（k=2）。最后利用该探头对一个直径为420 μm的微孔进行了实际测量,测量结果验证了该探头的实用性。

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	李瑞君
	许鹏
	唐帅涛
	范光照
	程真英

关键词 ：计量学, 探头, 微孔, 刚度, 重复性

Abstract：The research and development of high-precision probes are described. A micro-hole measuring probe composed of a two-dimensional angle sensor, an elastic mechanism, and a homemade micro-spherical tungsten stylus is introduced. The stiffness and repeatability of the probe were verified by simulation and experiments respectively. The results show that the stiffness of the probe in three-dimensional directions is less than 0.4 mN/μm, the repeatability is better than 20 nm (k = 2). Finally, a practical measurement for a micro-hole with a diameter of approximately 420 μm was performed using the probe. The measurement results verified the practicality of the probe.

Key words： metrology probe micro-hole stiffness repeatbility

收稿日期: 2017-11-13 发布日期: 2018-09-05

PACS:

TB92

基金资助:国家自然科学基金（51675157）

通讯作者: 李瑞君 E-mail: rj-li@hfut.edu.cn

作者简介: 李瑞君（1976-）,男,内蒙古和林格尔人,合肥工业大学副教授,博士,主要研究方向为微纳米测量技术和光电检测等技术。 rj-li@hfut.edu.cn

引用本文:

李瑞君,许鹏,唐帅涛,范光照,程真英. 高精度微孔测量探头[J]. 计量学报, 2018, 39(5): 598-604.
LI Rui-jun,XU Peng,TANG Shuai-tao,FAN Kuang-chao,CHENG Zhen-ying. High-precision Probe for Measuring Micro-holes. Acta Metrologica Sinica, 2018, 39(5): 598-604.

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