1. College of Electronic Information, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, China
2. Xi’an Horological Research Institute of Light Industrial Co. Ltd, Xi’an, Shaanxi 710061, China
3. Xi’an Aero Engine (Group) Co. Ltd, Xi‘an, Shaanxi 710072, China
Abstract：Discourse the principle of multi-step rotation error separation algorithm technique is described. The frequency domain mixing compensation error separation algorithm is proposed. By analyzing the frequency domain characteristics of spindle error, roundness error and other components of the collected data,using Fourier transform to obtain harmonic isolated eccentric of error,separate roundness error by way of culling,compensating, the spindle error is given.The algorithm can solve the problem of harmonic suppression. Collecting data using roundness instrument at the job site and giving simulation analysis,verify the feasibility of the method and choose the least squares method as evaluation method.The gap between the roundness error evaluation value of three or four,five step and the roundness error of the manufacturers (40 nm) are respectively 118 nm,113 nm,145 nm,and the evaluation value of the frequency domain compensation method is 54 nm,and the gap is only 14 nm, the separation effect of frequency domain compensation method for error is obviously better than multi-step methods.
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2018, Vol. 39 
