Design of Angular Accelerometer Based on Resonant Optical Tunneling Effect
LI Hui-ming1,2,ZOU Lu1,2,JIAN Ao-qun1,2,WANG Lei-yang1,2,DUAN Qian-qian1,SANG Sheng-bo1
1. Micro-nano System Research Center, Taiyuan University of Technology, Taiyuan, Shanxi 030024, China
2. Key Laboratory of Advanced Transducers and Intelligent Control System, Shanxi Province and Ministry of Education, Taiyuan, Shanxi 030024, China)
Abstract：Resonant optical tunneling effect (ROTE) is used to describe a design method of angular acceleration sensor and its sensing characteristics are analyzed. Finally, through theoretical analysis and simulation calculation using Mathematica based on the resonant optical tunneling effect,the quality factor and sensitivityof the accelerometer reach up to 1.96×108 and 0.1 °/nm, respectively, which is higher than that of the classic F-P cavity.
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2018, Vol. 39 
