The Development of the Phase Stepping Gauge Block Interferometer
ZHANG Xu-dong1,LIU Xiang-bin1,WANG Shi-jie2, WANG Zhen-hua2,WU Yue-yan1
1.National Institute of Metrology, Beijing 100029, China
2.Inner Mongolia Institute of Metrology Testing and Research, Hohhot, Inner Mongolia 010000, China
Abstract：A gauge block interferometer for 0.5～100 mm by phase stepping interferometry is described. Two stabilized lasers, 633nm and 543nm, are introduced into the interferometer using a single mode fiber. The interference fringes are taken using a CCD camera and the fractions of the fringes are calculated by five step phase stepping method with mechanical phase shift. The gauge block length is measured by the method of exact fractions. The uncertainty for gauge block measurement reaches to U=0.015 μm+0.07×10-6L (L is the length of gauge block, mm).
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2017, Vol. 38 
