Abstract：On wafer S-parameter accuracy mainly depends on the characteristic impedance of transmission line standard. An accurate method of determination of characteristic impedance of coplanar waveguide is researched, which involves the deduction and optimization of Multi-TRL（Multi-Thru Reflect Line）algorithms to obtain the propagation constant, and uses the propagation constant determines characteristic impedance. The extraction software “wyb” of propagation constant and characteristic impedance were developed, and the method was validated against commercial Multi-TRL software Wincal by the same input of the measurements of calibration standards at on-wafer reference material RM8130. The result shows that, between 5~10 GHz, the relative error of the magnitude of characteristic impedance is within ±0.6％, and the phase is within ±0.55°.As frequency goes above to 40 GHz , the relative error of the magnitude of characteristic impedance is within±0.2%, the phase error within ±0.4°.
王一帮,栾鹏,吴爱华,梁法国,孙静. 基于Multi-TRL算法的传输线特征阻抗定标[J]. 计量学报, 2017, 38(2): 225-229.
WANG Yi-bang,LUAN Peng,WU Ai-hua,LIANG Fa-guo,SUN Jing. An Accurate Determination Method of Characteristic Impedance of Transmission Line Based on Multi-TRL Algorithms. Acta Metrologica Sinica, 2017, 38(2): 225-229.
［1］Kasten J S, Steer M B, Pomerleau R. Enhanced through-reflect-line characterization of two-port measuring systems using free-space capacitance calculation ［J］. IEEE Trans Microwave Theory Tech,1990,38（2）:215-217.
［2］Marks R B, Williams D F. Characteristic Impedance Determination Using Propagation Constant Measurement ［J］. IEEE Microwave and guided wave letters,1991,1（6）: 141-143.
［3］Heinrich W. Quasi-TEM Description of MMIC Coplanar Lines Including Conductor-Loss Effects ［J］. IEEE TransMicrowave Theory Tech,1993,41（1）:45-51.
［4］Marks R. A multiline method of network analyzer calibration ［J］. IEEE Trans Microwave Theory and Tech,1991,39（7）:1205-1215.
［5］Williams D F, Marks R B. Transmission line capacitance measurement ［J］. IEEE microwave and guided wave letters,1991,1(9):243-245.
［6］黄辉.毫米波在片散射参数计量方法与技术研究［D］. 北京:北京理工大学,2013.
［7］Degroot D,Walker D, Marks R. Impedance mismatch effects on propagation constant measurement［C］// IEEE 5th Topical Meeting on Electrical Performance of Electronic Packaging, 1996.
［8］Degroot D, Jargon J,Marks R. Multiline TRL revealed［C］//ARFTG Conference Digest-Fall, 60th IEEE, 2002: 131-155.
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