The Measurement of Single-layer Thickness of Graphene Materials by High Resolution Transmission Electron Microscopy
WANG Chen-ying1,2,3,JING Wei-xuan2,JIANG Zhuang-de1,2,3, LIN Qi-jing1,2,HAN Feng1,2,LI Lei1,2
1. Collaborative Innovation Center of High-End Manufacturing Equipment, Xi’an, Shaanxi 710049, China
2. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710054, China
3. Collaborative Innovation Center of Suzhou Nano Science and Technology, Suzhou, Jiangsu 215123, China
Abstract：The cross-sectional sample is made with the film of graphene material and is observed by high-resolution transmission electron microscopy (HRTEM). When the temperature is 20 ℃ , the value of the thickness of single-layer of graphene material measured by the software of HRTEM is 0.411 nm, otherwise, the cross-sectional of each layer of graphene material is not straight. The data of the edge of each layers could be obtained by the method of local shearing and increasing the gap, the value of thickness of the layer is 0.390 nm which is calculated by the histogram method, and the value of the uncertainty of the thickness is 0.042 nm. When the confidence level is 95%, the value of the thickness of single-layer graphene material is (0.390±0.086) nm. Compared with the nominal thickness of graphene,the calculated value of the thickness of single-layer graphene material is bigger. The difference of the thickness values is reasonable because there are gaps between the layers of grapheme material.nm. Compared with the nominal value of the graphene thickness，the single-layer thickness of grapheme-like was bigger. The different of the thickness values was thought to the gaps between the layer and the layer of grapheme-like.
王琛英,景蔚萱,蒋庄德,林启敬,韩枫,李磊. 采用HRTEM对石墨烯材料单层厚度测量的研究[J]. 计量学报, 2017, 38(2): 145-148.
WANG Chen-ying,JING Wei-xuan,JIANG Zhuang-de, LIN Qi-jing,HAN Feng,LI Lei. The Measurement of Single-layer Thickness of Graphene Materials by High Resolution Transmission Electron Microscopy. Acta Metrologica Sinica, 2017, 38(2): 145-148.
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2017, Vol. 38 
