1. School of Instrument Science and Opto-electronic Engineering, HFUT, Hefei, Anhui 230009, China
2. Anhui Institute of Metrology, Hefei, Anhui 230051, China
Abstract：The method of uncertainty estimation of coordinate measuring machine (CMM) for size measurement is presented.Black box model, which complies with the specifications of ISO, is established for uncertainty estimation of CMM. Six quantum property factors and their quantification or calibration introduced by the uncertainty components are analyzed based on measurement system analysis. The evaluation models of uncertainty components are presented according to geometrical product specification (GPS). This method has proven to be feasible by the example of uncertainty estimation for diameter measurement of an experimental sample. Experimental result shows that the main source of uncertainty of CMM for size measurement is bias and linear, and its numerical value is 1.88 μm which is more than twice the combination of all the other uncertainty components. Moreover, the uncertainty component of temperature is only 0.04 μm, it can be neglected in practice.
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［2］ISO14253-1: 2013, Geometrical Product Specification (GPS)-Inspection by measurement of workpieces and measuring equipment-Part 1: Decision rules for Proving Conformity or nonconformity with Specifications［S］.
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［7］ISO/TS 14253-2:2011, Geometrical Product Specification (GPS)-Inspection by measurement of workpieces and measuring equipment-Part 2: Guide to the estimation of uncertainty in GPS measurement,in calibration of measuring equipment and in product verification［S］.
［8］倪育才. 实用测量不确定度评定(第4版)［M］. 北京:中国质检出版社,2014:73-87,101-103,164-170.
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［10］ISO14978:2006, Geometrical Product Specification (GPS)-General concepts and requirements for GPS measuring equipment［S］.
2016, Vol. 37 
